Features: The Liquid Chiller is a cryogenic cooling system specifically developed for semiconductor processes. It features patented technology that allows precise temperature controls across a wide temperature range.
Applications: This system is ideal for use in cooling equipment required for probe testing, package testing, and module testing processes.
| Name | Temp.Range | Temp. Stability | Cooling Capacity | Flow Rate (lpm) |
|---|---|---|---|---|
| Iron-7 | -60℃ ~ +150℃ |
±0.1 ℃ | 0.5Kw (at -50 deg ℃) |
Max, 2.5 lpm |
| Iron-10 | -60℃ ~ +150℃ |
±0.1 ℃ | 2KW(+@) (at -50 deg ℃) |
Max, 5 lpm |
Features: The Air Chiller is a cryogenic air-cooling system that uses dry air for effective target cooling and temperature control. This system eliminates the need for coolant while providing a cost-effective cooling solution.
Applications: It is suitable for semiconductor process equipment such as probers, handlers, and surface-mount machines that require cold testing.
| Name | Temp.Range | Temp. Stability | Cooling Capacity | Flow Rate (lpm) |
|---|---|---|---|---|
| Nos-1 | -10 ℃ ~ + 30 ℃ |
±0.1 ℃ | 1Kw (at +20.0 deg ℃) |
Max, 200 lpm |
| Nos-2 | -10 ℃ ~ + 30 ℃ |
±0.1 ℃ | 2Kw (at +20.0 deg ℃) |
Max, 400 lpm |
| Nos-3 | -10 ℃ ~ + 30 ℃ |
±0.1 ℃ | 3Kw (at +20.0 deg ℃) |
Max, 605 lpm |
| Nos-4 | -10 ℃ ~ + 30 ℃ |
±0.1 ℃ | 4Kw (at +20.0 deg ℃) |
Max, 800 lpm |
| Nos-5 | -10 ℃ ~ + 30 ℃ |
±0.1 ℃ | 5Kw (at +20.0 deg ℃) |
Max, 1,000 lpm |
| Nos-6 | -80 ℃ ~ + 30 ℃ |
±0.1 ℃ | 1Kw (at -50.0 deg ℃) |
Max, 600 lpm |
Features: The Heat Exchanger is a customizable system that controls heat loads based on specific process conditions and fluid properties. It can regulate temperatures ranging from ambient levels (25°C) to high temperatures (200°C).
Applications: This system is used in process equipment that requires heat dissipation and temperature control at ambient conditions rather than cryogenic levels.
| Name | Temp.Range | Temp. Stability | Cooling Capacity | Flow Rate (lpm) |
|---|---|---|---|---|
| Thor-2 | +25 ℃ ~ + 250 ℃ |
±0.1 ℃ | 2kW (at +30 deg ℃) | Max, 20 lpm |
| Thor-3 | +25 ℃ ~ + 250 ℃ |
±0.1 ℃ | 3kW (at +30 deg ℃) | Max, 20 lpm |
| Thor-5 | +25 ℃ ~ + 250 ℃ |
±0.1 ℃ | 5kW (at +30 deg ℃) | Max, 25 lpm |
| Thor-8 | +25 ℃ ~ + 250 ℃ |
±0.1 ℃ | 8kW (at +30 deg ℃) | Max, 30 lpm |
| Thor-10 | +25 ℃ ~ + 250 ℃ |
±0.1 ℃ | 10kW (at +30 deg ℃) | Max, 30 lpm |
| Thor-25 | +25 ℃ ~ + 250 ℃ |
±0.1 ℃ | 25kW (at +30 deg ℃) | Max, 40 lpm |
