Features: The Cryo Engine is an eco-friendly helium cooling system. It uses helium, an environmentally-friendly refrigerant, without the need for Freon gas. This system provides a cryogenic cooling solution that can replace conventional chiller systems.
Applications: It is designed as a built-in cryogenic cooling system that can be installed inside semiconductor process equipment.
| Name | Temp.Range | Temp. Stability | Cooling Capacity | Input Power |
|---|---|---|---|---|
| Marble-1.0L | -200℃ to -20℃ | ±0.1 ℃ | 250W @ -60℃ | 1P.200V.5A (50/60Hz) |
| 300W @ -50℃ | ||||
| 350W @ -40℃ | ||||
| Marble-1.0A | -200℃ to -20℃ | ±0.1 ℃ | 150pm @ -90℃ | 1P.200V.5A (50/60Hz) |
| 300Lpm @ -60℃ | ||||
| 450Lpm @ -40℃ | ||||
| Marble-1.0C | -200℃ to -20℃ | ±0.1 ℃ | 150W @ -150℃ | 1P.200V.5A (50/60Hz) |
| 300W @ -110℃ | ||||
| 400W @ -90℃ |
